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Turbo Pump Controller
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Helium Leak Detector
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Others
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Turbo Pump Controller
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Motor Driver/ Invertor
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Vacuum Valve
Pressure Controller
Robot
Chiller
Others
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853-034399-100
853-034399-100
ASSY CA TC J-TYPE UPPER CHAMBER THERMOCOUPLE
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853-034399-100
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January 2026
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Maintenance & Technical Support
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